iVD

Key Advantages
Wireless transmission convenience + high-precision vibration measurement + rapid vibration analysis and forecasting.

Paired with a powerful vibration measurement and analysis software, the system supports multi-sensor wireless synchronization, real-time data acquisition and analysis, dual-sensor synchronization, FFT frequency domain analysis, and vibration trend diagnostics.

Applications – Vibration Measurement in Semiconductor & Optoelectronics Industry
1.Monitoring wafer transfer stability of semiconductor robotic arms
2.Stability analysis of photoresist coating in semiconductor lithography tools
3.Process monitoring of wafer dicing and grinding in semiconductor packaging
4.CMP (Chemical Mechanical Polishing) equipment process diagnostics
5.Condition monitoring of facility vacuum pumps and chillers
6.Stability monitoring of panel cleaning and coating processes
7.Measurement stability analysis of precision AOI equipment
8.Probe station vibration and measurement stability monitoring

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