Exposure Machine with Precision Granite Platform

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Using high-precision measurement equipment such as laser interferometers, geometric errors of the machine (including straightness, perpendicularity, and positioning errors) are accurately measured and compensated. Even if the machine body has slight deviations, automatic software calibration enables high-precision machining.

By employing temperature compensation technology, dimensional changes caused by thermal expansion during the machining process are detected and corrected in real time, maintaining stable micron-level accuracy.

Precision grinding combined with a multi-constraint structural design enhances the platform’s rigidity and vibration resistance, ensuring flatness and positioning accuracy at the micron level.

This micron-level flatness error control is widely applied in semiconductor exposure machines, optical inspection, and high-precision manufacturing fields, providing a stable and precise foundational platform that improves product yield and process efficiency.

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