Description
The LBT Precision Air-Bearing Motion Platform is a next-generation nano-level air-bearing positioning platform developed to meet the needs of advanced semiconductor and display manufacturing equipment. It is suitable for industries and applications such as Micro LED, semiconductor AOI, PCB inspection, automated precision measurement, and laser cutting.
This platform adopts a patented air-bearing structure, enabling nano-level accuracy within one-thousandth of a second. It significantly reduces motion control settling time and component wear, thereby enhancing the productivity and reliability of customers’ equipment. The platform meets market demands for compact installation space, high speed, and high precision.
With its modular design, the LBT platform helps reduce implementation time and labor costs. Independently developed and designed by TOYO and manufactured in Taiwan, it offers reduced cost and shorter lead time, providing high-tech industry customers with a cost-effective domestic alternative in addition to overseas brands. The platform has undergone comprehensive safety and functional testing. During installation, users only need to secure the mounting screw holes, helping save labor and setup time.
(1) High Geometric Precision:
Easily achieves ultra-high six-degree-of-freedom accuracy, including linear accuracy, horizontal straightness, vertical straightness, yaw, pitch, roll, and orthogonality between axes.
(2) Low Noise:
The non-contact motion design eliminates mechanical friction noise during high-speed movement, helping reduce factory noise.
(3) Maintenance-Free:
Unlike traditional linear guide systems, the air-bearing platform features a simple structure and requires no additional maintenance.
(4) Modular Design:
Highly modular green design and manufacturing, combined with high-efficiency direct drive and ultra-low-loss air bearings, meet the Class 10 ultra-low particle generation cleanroom requirements of target markets.
(5) Convenience:
Multiple control modes, flexible control interfaces, and user-friendly operation software allow users to select the most suitable operating method according to their preferences.
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