Vacuum IR Drying Equipment

。High-Performance Drying (Infrared IR):
Infrared radiation heats up quickly, reducing drying/curing time.
Infrared's three key properties—penetration, reflection, and absorption—ensure excellent curing results for specific materials.

。Energy Saving and Carbon Reduction:
No need to heat the entire space; only the wafer surface is heated, reducing energy consumption.
Compared to traditional hot air drying, energy consumption can be reduced by 30%.

。Uniformity and Precision:
Infrared penetrates materials for simultaneous internal and external heating, unlike hot air drying methods.
Infrared wavelengths can be selected based on material properties to achieve optimal absorption.

。Reduced Oxidation Risk (Vacuum Environment):
Low oxygen levels in a vacuum environment prevent wafer oxidation during high-temperature processes.
Superior bubble removal performance compared to atmospheric hot air ovens.

。Control Capability (Process Flexibility):
Multi-stage baking recipes and parameters with precise temperature and vacuum pressure control.
9-zone independent control system ensures uniform drying temperatures across all wafers.

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