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Description
CVD diamond machine
CVDiam® HF120 have the largest deposition area worldwide
Diamond on Wafer 鑽石晶圓
DOS (diamond on silicon) and DOI (diamond on insulator)
Coating on 4’’, 6’’, 8’’ and 12’’ Si wafers
Coating on plane or patterned surfaces
High thermal conductivity > 1200 W.m-1.K-1
Diamond can be polished to RMS < 0.3nm
CVDiam® HF120 have the largest deposition area worldwide
Diamond on Wafer 鑽石晶圓
DOS (diamond on silicon) and DOI (diamond on insulator)
Coating on 4’’, 6’’, 8’’ and 12’’ Si wafers
Coating on plane or patterned surfaces
High thermal conductivity > 1200 W.m-1.K-1
Diamond can be polished to RMS < 0.3nm
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