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Description
The Smart Sensing Wafer is designed for semiconductor wafer transfer and equipment condition monitoring. It integrates tri-axis vibration measurement, dual-axis leveling, temperature and humidity sensing, and data logging functions to provide real-time insight into stability changes during wafer handling processes involving Robots, Stages, OHT, FOUP, EFEM, and related equipment.
With wireless Bluetooth transmission and built-in Flash CSV data recording, the Smart Sensing Wafer helps customers quickly identify abnormal vibration, leveling deviation, and environmental changes, improving equipment calibration efficiency, process stability, and predictive maintenance capabilities.
With wireless Bluetooth transmission and built-in Flash CSV data recording, the Smart Sensing Wafer helps customers quickly identify abnormal vibration, leveling deviation, and environmental changes, improving equipment calibration efficiency, process stability, and predictive maintenance capabilities.
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Ball Screw
Rotary Series
Single Axis Actuator
Ball Spline
Linear Guide
Barrier terminal blocks
PCB terminal blocks
Φ16mm
Φ22mm
Push-in switch
Safety / Limit switches
Vandal resistant switches
Interlock switches
Screw connection
Spring connection
Triple Type Temp. & Humi.Chamber
Salt Spray Tester
Thermal Shock Tester
Programmable Temp. & Humi. Chamber
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