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Description
High-speed 、non-contact 3D surface profiler
Auto Scan White Light Interferometer applications：
－Bump height & fineline height/ width/ spacing measurement
－Thin film measurement
－Delivering sub-nanometer precision
－Front-End & Back-End measurement applications
Auto Scan White Light Interferometer applications：
－Bump height & fineline height/ width/ spacing measurement
－Thin film measurement
－Delivering sub-nanometer precision
－Front-End & Back-End measurement applications
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