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Description
HIWINMIKRO Full Series of Vacuum Motors: Based on years of cooperation with high-end semiconductor manufacturers, HIWIN has launched vacuum linear motors and vacuum direct drive motor series to provide customers with the best solutions for vacuum applications. The entire range offers powerful performance and meets the most stringent vacuum requirements. Application examples : Wafer grinding, Centrifugal cleaning, Centrifugal drying, PVD, CVD, Nanoscale wafer inspection, etc.
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Controller & Drive
Linear motor stages-Standard Single Axis
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