Login
Contact
Share :
Description
CHELIC MF Series – Gas Mass Flow Meters & Controllers
Supporting EtherCAT and RS-485 communication, the MF Series offers ultra-high precision of ±0.3% F.S. and millisecond-level fast response.
Designed for semiconductor, precision manufacturing, and multi-gas applications,
it features international certifications, corrosion-resistant construction
, and a full range of models for both flow control and monitoring—your reliable choice for smart manufacturing.
Supporting EtherCAT and RS-485 communication, the MF Series offers ultra-high precision of ±0.3% F.S. and millisecond-level fast response.
Designed for semiconductor, precision manufacturing, and multi-gas applications,
it features international certifications, corrosion-resistant construction
, and a full range of models for both flow control and monitoring—your reliable choice for smart manufacturing.
Related Products
Communication protocol(save the time of wiring)
Chemical Liquid Valves
High-Precision Electric Linear Slide
Electric Rotary Actuator
Electric Rotary Pneumatic Gripper
Three-Finger Electric Gripper
Two-Finger Electric Gripper
Ultrasonic Flow Meter
You may also like
i-Tork Electric Actuator | The genuine authorized distributor in Taiwan is DDD Co.
For field sampling and calibration, data analysis and diagnostics ( VAISALA )
SMC IP8100-031-DH Pneumatic Proportional Control Valve SMC Explosion-proof Positioner Made in Japan Taiwan Explosion-proof TS Mark (DDD CO. Taiwan)
VaiNet Wireless Temperature Data Logger ( VAISALA )
Handheld probe for humidity and temperature ( VAISALA )
Φ16mm
GMP80P Portable carbon dioxide probe with pump sampling ( VAISALA )
Rotork YTC YT-1000R YT-1000L | Control Valve Positioner | Pneumatic Proportional Valve | Explosion-Proof TS Mark
Handheld probe for dew point and temperature ( VAISALA )
Web資料傳輸組 ( MG ) ( 原 M-SYSTEM )
Smart transmitters for Indigo probes
Selector Switch
Panasonic Driver and motor wires series - encoding/power/braking-wire harness manufacturing / PLC I/O transmission lines and customized manufacturing of matching terminal blocks
Digital Inverter Type MIG / MAG Welding Machine
TOUGU DENKI Hydraulic Edge Position Controller
Product assembly conveyor system
DataMan 475V
IMAGE-BASED ID SCANNERS AV500/AV900
Zero Point System
ORION 288 SEAL RECONDITIONER
FIBC(Flexible freight bags) vibration machine
Process sensors
ROTARY ENCODER
Safety Evaluation and Personnel Training of Automatic Equipment
Support Units
Highest Rated Products
AMR Robot
Multi-Axis Robot
AI Master
FOBA F0100-ir 超快雷射雕刻系統
M20W MINI fiber laser marking and engraving machine
AGS-7 Robot Polishing Station
collaborative arm
ATM3 3D Air Aurora Machine
Factory Energy Management System
Smart Forklift CDD14
600kg AGV AMR Chassis Platform Build Your Own Mobile Robotics
Better Packages WAT Tape Dispenser
GENERAL PURPOSE HAND HELD READERS GRYPHON FAMILY
XTS (eXtended Transport System)
HALCON
COMPACT ARM CAW SERIES
Elastomer Couplings
Bellows Couplings
Disc Pack Couplings
Torque Limiters
Line Shaft Couplings
Customized Couplings
Gear Couplings
ATEX Couplings & Torque Limiters
Xsmart On-Line XRF
ROBOT
Electric Gripper Series
AI NVH
Idustrial Camera
IRIS-M™ Optical Vibration Analysis
Back
Product Inquiry