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Description
CHELIC MF Series – Gas Mass Flow Meters & Controllers
Supporting EtherCAT and RS-485 communication, the MF Series offers ultra-high precision of ±0.3% F.S. and millisecond-level fast response.
Designed for semiconductor, precision manufacturing, and multi-gas applications,
it features international certifications, corrosion-resistant construction
, and a full range of models for both flow control and monitoring—your reliable choice for smart manufacturing.
Supporting EtherCAT and RS-485 communication, the MF Series offers ultra-high precision of ±0.3% F.S. and millisecond-level fast response.
Designed for semiconductor, precision manufacturing, and multi-gas applications,
it features international certifications, corrosion-resistant construction
, and a full range of models for both flow control and monitoring—your reliable choice for smart manufacturing.
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