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Description
The current market size of wafer robots is approximately US$810 million, and is expected to reach US$1.03 billion in 2025. As the semiconductor industry continues to expand, the demand and performance requirements for wafer robots have also increased. This technology develops high-speed and low-vibration control robots and adopts an embedded control system. The electronic control components and the robot are integrated into the design, which effectively improves the space utilization of the robot integrated into the EFEM and solves problems such as inconvenient maintenance and electromagnetic interference.
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