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Description
◼Nano Positioning Stage
Nano-positioning stage was developed by HIWIN MIKROSYSTEM won the 2023 Taiwan.
Excellence-Gold Award. Nano-positioning stage, with nanoscale stability and pair with software solutions to improve the overall equipment accuracy.
Perfectly present the highly integrated capabilities of machine, electricity and software to provide competitive solutions to meet the upgrading demands of semiconductor inspection equipment.
Features：
➢ Low profile structure
➢ High geometric accuracy
➢ High velocity stability ± 0.1% @ 100 mm/s
➢ Nano positioning stability ± 2 nm
➢ Possibility of equipping with smart modules, keeping track of machine statuses
➢ Customized modular design
➢ Integrated electronic control system, providing one stop service
Nano-positioning stage was developed by HIWIN MIKROSYSTEM won the 2023 Taiwan.
Excellence-Gold Award. Nano-positioning stage, with nanoscale stability and pair with software solutions to improve the overall equipment accuracy.
Perfectly present the highly integrated capabilities of machine, electricity and software to provide competitive solutions to meet the upgrading demands of semiconductor inspection equipment.
Features：
➢ Low profile structure
➢ High geometric accuracy
➢ High velocity stability ± 0.1% @ 100 mm/s
➢ Nano positioning stability ± 2 nm
➢ Possibility of equipping with smart modules, keeping track of machine statuses
➢ Customized modular design
➢ Integrated electronic control system, providing one stop service
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