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Description
* With the features of .Net framework. The program is very flexible.
* Easy-to-use interface. Easy to learn and understand quickly.
* Meet the GEM and 300mm communication specifications of major wafer manufacturer in Taiwan.
* GEM Driver is divided into 14 major modules. Exactly the same as SECS/GEM Implemented Table.
* Both Host and Equipment are divided into 14 major modules. Easier to select the Stream Function from modules.
* The communication is very compatible. Highly compatible with the command format sent by Host.
* Each command from Host can be reply automatically or manually.
* The way to choose agree or reject the received Stream Function is quite simple. No need to consider encoding and decoding.
* All SV, DV, EC, Alarm, Report, Event, Recipe Body files are combined into a single file (MS Excel). Easy to manage.
* With built-in Log string for SECS transmission, users don't need to decode anymore.
* Easy-to-use interface. Easy to learn and understand quickly.
* Meet the GEM and 300mm communication specifications of major wafer manufacturer in Taiwan.
* GEM Driver is divided into 14 major modules. Exactly the same as SECS/GEM Implemented Table.
* Both Host and Equipment are divided into 14 major modules. Easier to select the Stream Function from modules.
* The communication is very compatible. Highly compatible with the command format sent by Host.
* Each command from Host can be reply automatically or manually.
* The way to choose agree or reject the received Stream Function is quite simple. No need to consider encoding and decoding.
* All SV, DV, EC, Alarm, Report, Event, Recipe Body files are combined into a single file (MS Excel). Easy to manage.
* With built-in Log string for SECS transmission, users don't need to decode anymore.
Related Products
XGEM 300mm Driver
XGEM AUO Module
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